Browse "School of Electrical Engineering(전기및전자공학부)" bySubjectsacrificial layer

Showing results 1 to 1 of 1

1
Fabrication of nano-gap electrode pairs using atomic-layer-deposited sacrificial layer and shadow deposition

Park, CW; Lim, JW; Yu, HY; Pi, UH; Ryu, MK; Choi, Sung-Yoolresearcher, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, v.45, pp.4293 - 4295, 2006-05

Discover

Type

. next

Open Access

Date issued

. next

Subject

. next

rss_1.0 rss_2.0 atom_1.0