Browse "School of Electrical Engineering(전기및전자공학부)" bySubjectpolyimide sacrificial layer

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A concave-patterned TiN/PECVD-Si3N4/TiN diaphragm MEMS acoustic sensor based on a polyimide sacrificial layer

Lee, Jaewoo; Jeon, J. H.; Je, C. H.; Kim, Y-G; Lee, S. Q.; Yang, W. S.; Lee, J. S.; et al, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.25, no.12, 2015-12

TiN/PECVD-Si3N4/TiN diaphragm-based capacitive-type MEMS acoustic sensor

Lee, Jae Woo; Jeon, J. H.; Kim, Y. G.; Lee, S. Q.; Yang, W. S.; Lee, Jungsoo; Lee, Sang-Gugresearcher, ELECTRONICS LETTERS, v.52, no.6, pp.468 - 469, 2016-03



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