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A new low-resistance antifuse with planar metal/dielectric/poly-Si/dielectric/metal structure

Baek, JT; Chung, SH; Kang, SW; Ahn, Byung Tae; Yoo, Hyung Joun, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.36, no.3B, pp.1642 - 1645, 1997-03

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