Browse "School of Electrical Engineering(전기및전자공학부)" by Subject double-resist process

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Sub-60-nm quasi-planar FinFETs fabricated using a simplified process

Lindert, N; Chang, LL; Choi, Yang-Kyu; Anderson, EH; Lee, WC; King, TJ; Bokor, J; et al, IEEE ELECTRON DEVICE LETTERS, v.22, no.10, pp.487 - 489, 2001-10

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