Browse "School of Electrical Engineering(전기및전자공학부)" by Subject VAPOR HF
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| Gas-phase etching of TEOS and PSG sacrifice layers using anhydrous HF and CH3OH Chung, HH; Jang, WI; Lee, CS; Lee, JH; Yoo, Hyung Joun, JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.30, no.3, pp.628 - 631, 1997-06 |
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