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Effect of Hydrogen on Hafnium Zirconium Oxide Fabricated by Atomic Layer Deposition Using H2O2 Oxidant Kim, Hyoungkyu; Yun, Seokjung; Kim, Tae Ho; Kim, Hoon; Bae, Changdeuck; Jeon, Sanghun; Hong, Seungbum, PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, v.15, no.5, 2021-05 |
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