Browse "School of Electrical Engineering(전기및전자공학부)" by Subject NEW STRUCTURE OF PHOTOMASK
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| LITHOGRAPHIC PERFORMANCE ENHANCEMENT USING DUMMY DIFFRACTION MASK Yoo, Hyung Joun; OH, YH; PARK, BS; CHOI, SS; JEON, YJ; LEE, C; Park, Sin Chong, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.32, no.12B, pp.5903 - 5908, 1993-12 |
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