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A Low Contact Resistance 4-Terminal Mems Relay: Theoretical Analysis, Design, and Demonstration Yoon, Yong Hoon; Jin, Yun Su; Kim, Chang-Keun; Hong, Songcheol; Yoon, Jun-Bo, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.27, no.3, pp.497 - 505, 2018-06 |
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