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Research on electromigration-resistance improvement of Cu interconnect by graphene and polymer/graphene composite capping layer = 그래핀과 고분자/그래핀 혼합물 캡핑층을 이용한 구리 배선의 일렉트로마이그레이션 저항성 개선 연구link

Yoon, Seong Jun; 윤성준; et al, 한국과학기술원, 2015

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