Browse "School of Electrical Engineering(전기및전자공학부)" bySubject(110) silicon
Showing results 1 to 1 of 1
| Vertical Mirror Fabrication Combining KOH Etch and DRIE of (110) Silicon Lee, D; Yu, Kyoungsikresearcher; Krishnamoorthy, U; Solgaard, O, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.18, no.1, pp.217 - 227, 2009-02 |
Discover
Open Access
- 565 OA Article
Date issued
- 2,378 2020 - 2022
- 18,557 2010 - 2019
- 15,061 2000 - 2009
- 7,647 1990 - 1999
- 2,391 1980 - 1989