Browse "School of Electrical Engineering(전기및전자공학부)" by Author Baciocchi, M
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| Exposure latitude and CD control study for additively patterned x-ray mask with GBit DRAM complexity. Baciocchi, M; DiFabrizio, E; Gentili, M; Grella, L; Maggiora, L; Mastrogiacomo, L; Peschiaroli, D; et al, MICROELECTRONIC ENGINEERING, v.30, no.1-4, pp.195 - 198, 1996-01 |
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