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EFFECTS OF SURFACE PRETREATMENT OF POLYSILICON ELECTRODE PRIOR TO SI3N4 DEPOSITION ON THE ELECTRICAL CHARACTERISTICS OF SI3N4 DIELECTRIC FILMS

Yoon, Giwan; JOSHI, AB; KWONG, DL; MATHEWS, VK; THAKUR, RPS; FAZAN, PC, IEEE TRANSACTIONS ON ELECTRON DEVICES, v.41, no.3, pp.347 - 351, 1994-03

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