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Low Temperature and Ion-Cut Based Monolithic 3D Process Integration Platform Incorporated with CMOS, RRAM and Photo-Sensor Circuits

Han, Hoonhee; Cho, Byung-Jin; Choi, Rino; Jung, Seong-Ook; S. C. Song; Choi, Changhwan; Chung, SungWoo, 66th IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM), IEEE, 2020-12-15

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