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32 x 32 silicon photonic MEMS switch with gap-adjustable directional couplers fabricated in commercial CMOS foundry Han, Sangyoon; Beguelin, Jeremy; Ochikubo, Lane; Jacobs, John; Seok, Tae J.; Yu, Kyoungsik; Quack, Niels; et al, JOURNAL OF OPTICAL MICROSYSTEMS, v.1, no.2, 2021-04 |
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