Browse "School of Electrical Engineering(전기및전자공학부)" by Author Ma, Kyung Yeol
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| Ultralow-k Amorphous Boron Nitride Film for Copper Interconnect Capping Layer Kim, Kiryong; Kim, Hyeongjoon; Lee, Sun-Woo; Lee, Min Yung; Lee, Gyusoup; Park, Youngkeun; Kim, Heetae; et al, IEEE TRANSACTIONS ON ELECTRON DEVICES, v.70, no.5, pp.2588 - 2593, 2023-05 |
| Wafer-scale growth of amorphous boron nitride thin film Kim, Hyeongjoon; Kim, Kiryong; Lee, Sun-Woo; Lee, Min Yung; Lee, Gyusoup; Park, YoungKeun; Kim, Heetae; et al, Boron Nitride Workshop 2023, Montpellier University, 2023-05-29 |
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