Browse "School of Electrical Engineering(전기및전자공학부)" by Author Dong, JR
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| Annealing and oxidation of silicon oxide films prepared by plasma-enhanced chemical vapor deposition Chen, XY; Lu, YF; Tang, LJ; Wu, YH; Cho, Byung Jin; Xu, XJ; Dong, JR; et al, JOURNAL OF APPLIED PHYSICS, v.97, no.1, 2005-01 |
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