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Mega Bit DRAM Capacitor를 위한 무결함 박막 SiO2

이귀로; 여인석; 윤규한; 김병석; 최민성; 김병식, 대한전자공학회 학술대회, v.9, no.5, pp.436 - 438, 대한전자공학회, 1987-07

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