Browse "School of Electrical Engineering(전기및전자공학부)" by Author Wada, H.

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High speed MEMS scanning mirror with vertical combdrive

Wada, H.; Lee, D.; Yu, Kyoungsik; Krishnamoorthy; Zappe, S.; Solgaard, O., International Conference on Optics-Photonics Design and Fabrication, International Conference on Optics-Photonics Design and Fabrication, 2002

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