Showing results 22 to 23 of 23
Topology-oriented pattern extraction and classification for synthesizing lithography test patterns Shim, Seongbo; Shin, Youngsoo, JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, v.14, no.1, 2015-01 |
Verification of Directed Self-Assembly (DSA) Guide Patterns through Machine Learning Shim, Seongbo; Cai, Sibo; Yang, Seunghune; Choi, Jungdal; Shin, Youngsoo, Conference on Alternative Lithographic Technologies VII, SPIE, 2015-02-26 |
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