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Novel Vapor-Phase Synthesis of Flexible, Homogeneous Organic-Inorganic Hybrid Gate Dielectric with sub 5 nm Equivalent Oxide Thickness 김민주; Pak, Kwanyong; Hwang, Wan Sik; Im, Sung Gap; Cho, Byung Jin, ACS APPLIED MATERIALS & INTERFACES, v.10, no.43, pp.37326 - 37334, 2018-10 |
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