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An optomechanical pressure sensor using multimode interference couplers Hah, D; Yoon, E; Hong, Songcheol, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.38, no.4B, pp.2664 - 2668, 1999-04 |
An optomechanical pressure sensor using multimode interference couplers with polymer waveguides on a thin p(+)-Si membrane Hah, D; Yoon, E; Hong, Songcheol, SENSORS AND ACTUATORS A-PHYSICAL, v.79, no.3, pp.204 - 210, 2000-02 |
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