Showing results 1 to 1 of 1
Exposure latitude and CD control study for additively patterned x-ray mask with GBit DRAM complexity. Baciocchi, M; DiFabrizio, E; Gentili, M; Grella, L; Maggiora, L; Mastrogiacomo, L; Peschiaroli, D; et al, MICROELECTRONIC ENGINEERING, v.30, no.1-4, pp.195 - 198, 1996-01 |
Discover