Large area nanograting based nanowires production technology for high productivity and its applications = 대면적 나노그레이팅 기반의 높은 생산성을 가지는 나노와이어 제작 방법과 이의 응용에 관한 연구

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Nanowires have high potential to be applied to very wide range of science and engineering fields. So far, various fabrication methods for generating nanowires based on a top-down and bottom-up approaches. However, existing nanowires fabrication technologies show some problems, such as low productivity, material dependency, lack of dimension-controllability and so on. These technological hurdles make the existing nanowires fabrication method to be used in industrial and commercial applications. In this research, a novel approach for nanowires production based on a large-area, high-density nanograting template is proposed and demonstrated. A large-area nanograting pattern as a master template is developed through a novel repetitive pattern scaling technology. The fabricated master template was transferred to a plastic substrate through a high-resolution nanoimprinting lithography method reproducibly, as a disposable template. By using a conventional physical vapor deposition and wet etching process, both highly ordered nanowire arrays and randomly distributed nanowire network was successfully produced with a wide range of materials. By applying the proposed approach, industry-compatible high-productivity nanowires fabrication was successfully achieved. The proposed technology provides a way to nanowires production, with high material versatility, high regularity, high productivity and efficiency, which have not be achieved by conventional bottom-up based approaches. As practical applications of the proposed nanowire mass-production technology, a high-throughput palladium nanowire based hydrogen sensor and large-area wire grid polarizer for visible light polarizing were proposed and successfully demonstrated.
Yoon, Jun-Boresearcher윤준보
한국과학기술원 : 전기및전자공학과,
Issue Date
568579/325007  / 020095091

학위논문(박사) - 한국과학기술원 : 전기및전자공학과, 2014.2, [ xvi, 94 p. ]


Nanowire; 생산성; 대면적; 스페이서 리소그래피; 선격자 편광판; 센서; Nanograting; Sensors; Wire Grid Polarizer; Spacer Lithography; Large Area; High Productivity; 나노와이어; 나노그레이팅

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