학위논문(박사) - 한국과학기술원 : 전기및전자공학과, 2014.2, [ iv, 88 p. ]
high-K dielectrics; 고진공 열처리; EOT; 누설전류밀도; 원자층증착법; 고유전체; ALD; leakage current density; EOT; high vacuum anneal
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