학위논문(박사) - 한국과학기술원 : 전기및전자공학과, 2013.8, [ v, 119 p. ]
멤스; stiction; pull-in voltage; mechanical logic; mechanical switch; MEMS; 기계식 스위치; 기계식 로직; 풀인 전압; 스틱션
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