Polycrystalline materials such as steels(BCC) and aluminum alloys(FCC) show the strain hardening and the strain rate hardening during the plastic deformation. The strain hardening is induced by deformation resistance of dislocation glide on some crystallographic systems and increase of the dislocation density on grain boundaries or inner grain. However, the phenomenon of the strain rate hardening is not demonstrated distinctly. In this paper, tensile tests for various strain rates are performed in the rage of to then, specimens are extracted on the same strain position to investigate the microscopic behavior of deformed materials. The extracted specimen is investigated by using the electron backscattered diffraction(EBSD) and transmission electron microscopy(TEM) results which contain grain size, grain shape, aspect ratio and dislocation substructure.