Note: Simultaneous determination of local temperature and thickness of heated cantilevers using two-wavelength thermoreflectance

Abstract

In this work, we have demonstrated that two-wavelength thermoreflectance technique can be used to characterize the local thickness and temperature of heated cantilevers at steady-state operation. By taking the ratio of reflectances for two lasers with different wavelengths, the geometrical factor causing the mismatch between experimentally measured and theoretically calculated reflectances was eliminated. Based on the fitting analysis of the reflectance ratio of two wavelengths at various input powers to the heated cantilevers, the local temperature and thickness could be unambiguously determined.