기상유도결정화법 및 Hot-wire CVD 방법을 이용한 대결정립 다결정 Si 박막 성장에 관한 연구Growth of large-grained poly-Si film using vapor-induced crystallization and hot-wire CVD
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 안병태 | - |
| dc.contributor.advisor | Ahn, Byung-Tae | - |
| dc.contributor.author | 강승모 | - |
| dc.contributor.author | Kang, Seung-Mo | - |
| dc.date.accessioned | 2013-09-12T04:43:12Z | - |
| dc.date.available | 2013-09-12T04:43:12Z | - |
| dc.date.issued | 2012 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=511839&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/181980 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 신소재공학과, 2012.8, [ ix, 158 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 다결정실리콘 | - |
| dc.subject | 기상유도결정화 | - |
| dc.subject | 열선화학기상증착법 | - |
| dc.subject | polycrystalline Si | - |
| dc.subject | vapor-induced crystallization | - |
| dc.subject | HWCVD | - |
| dc.subject | Si Epitaxy | - |
| dc.subject | 실리콘 에피택시 | - |
| dc.title | 기상유도결정화법 및 Hot-wire CVD 방법을 이용한 대결정립 다결정 Si 박막 성장에 관한 연구 | - |
| dc.title.alternative | Growth of large-grained poly-Si film using vapor-induced crystallization and hot-wire CVD | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 511839/325007 | - |
| dc.description.department | 한국과학기술원 : 신소재공학과, | - |
| dc.identifier.uid | 020075244 | - |
| dc.contributor.localauthor | 안병태 | - |
| dc.contributor.localauthor | Ahn, Byung-Tae | - |
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