기상유도결정화법 및 Hot-wire CVD 방법을 이용한 대결정립 다결정 Si 박막 성장에 관한 연구Growth of large-grained poly-Si film using vapor-induced crystallization and hot-wire CVD
- Advisors
- 안병태researcher; Ahn, Byung-Tae
- Description
- 한국과학기술원 : 신소재공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2012
- Identifier
- 511839/325007 / 020075244
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 신소재공학과, 2012.8, [ ix, 158 p. ]
- Keywords
다결정실리콘; 기상유도결정화; 열선화학기상증착법; polycrystalline Si; vapor-induced crystallization; HWCVD; Si Epitaxy; 실리콘 에피택시
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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