기상유도결정화법에 의한 비정질 Si 박막의 저온결정화와 다결정 Si 박막트랜지스터에의 응용에 관한 연구Low temperature crystallization of amorphous Si thin films using vapor-induced crystallization and its application to polycrystalline Si thin film transistors
- Advisors
- 안병태researcher; Ahn, Byung-Tae
- Description
- 한국과학기술원 : 신소재공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2005
- Identifier
- 487895/325007 / 020005829
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 신소재공학과, 2005.8, [ ix, 128 p. ]
- Keywords
다결정 Si; 알루미늄유도결정화; 기상유도결정화; 박막트랜지스터; vapor-induced crystallization; aluminum-induced crystallization; AIC; poly-Si; thin film transistor; TFT; VIC
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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