Demonstration of graphene contact MEMS switch and its characterization = 그래핀을 접촉 물질로 가지는 마이크로 전자 기계 스위치의 구현 및 특성평가에 관한 연구

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Over the last a few decades, microelectromechanical system (MEMS) technology has established itself as a 21st century key technology thanks to the maturity of bulk and surface micromachining process. Nevertheless, the reliability issue remains as a major bottleneck to the commercialization since most MEMS switches suffer from various failure mechanisms within few cyclic operations. For reliable operation, gold (Au) is commonly and typically used due to its resistive characteristics to chemical contamination, excellent electrical property, and so on. However, Au still has a failure problem due to its lack of mechanical properties and this event requires deeper understandings and more thorough investigations toward the contact material of MEMS switches. Therefore, more studies about MEMS contact material are needed. Recently, graphene has actively been researched and given remarkable attentions. The graphene has its own excellent mechanical, chemical, electrical, and thermal properties; therefore, it is expected to be a superb candidate for a MEMS switch contact material. However, the graphene contact MEMS switch has not been developed due to its difficulty of fabrication. In this thesis, we developed and demonstrated the novel fabrication method which uses the graphene as a contact material for the MEMS switch. The lateral type switch was suggested as the graphene to graphene contact device without any fabrication problems. After demonstration, the characterization of the graphene contact switch was performed to confirm the graphene could be an alternative material for the MEMS switch contact. The material properties were compared with Au-typical contact material in MEMS switches. Two directional characterizations were performed which dealt with critical issues in MEMS switch contact field; physical surface change and adhesion force change. Atomic force microscopy (AFM) force-distance (F-D) method and I-V curve analyz-ing were used to investigate the physical ...
Advisors
Yoon, Jun-Boresearcher윤준보
Description
한국과학기술원 : 전기및전자공학과,
Publisher
한국과학기술원
Issue Date
2013
Identifier
513281/325007  / 020113274
Language
eng
Description

학위논문(석사) - 한국과학기술원 : 전기및전자공학과, 2013.2, [ v, 49 p. ]

Keywords

graphene; MEMS switch; NEMS switch; 그래핀; 멤스 스위치; 넴스 스위치; 신뢰성; reliability

URI
http://hdl.handle.net/10203/181029
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=513281&flag=dissertation
Appears in Collection
EE-Theses_Master(석사논문)
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