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Stability of CrFx films for phase-shifting mask Kim, Eun Ah; Hong, Seung Bum; Jiang, Zhong-Tao; Lim, Sung C; Woo, Sang-Gyun; Koh, Young-Bum; No, Kwangsoo, Photomask and X-Ray Mask Technology IV, v.3096, pp.294 - 297, 1997-04-17 |
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