Browse "Dept. of Materials Science and Engineering(신소재공학과)" by Author PAEK, MC

Showing results 1 to 5 of 5

1
A STUDY OF LATTICE DAMAGE IN SILICON INDUCED BY BF2+ ION-IMPLANTATION

PAEK, MC; KWON, OJ; Lee, JeongYong; Lim, Ho Bin, JOURNAL OF APPLIED PHYSICS, v.70, no.8, pp.4176 - 4180, 1991-10

2
CHARACTERIZATION OF SILICON SURFACE CONTAMINATION AND NEAR-SURFACE DAMAGE CAUSED BY C2F6 CHF3 REACTIVE ION ETCHING

YUN, SJ; PARK, SJ; PAEK, MC; Lee, JeongYong, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.137, no.8, pp.2634 - 2639, 1990-08

3
EFFECTS OF ANNEALING ON THE DAMAGE MORPHOLOGIES IN BF2+ ION-IMPLANTED (100)SILICON

PAEK, MC; Lim, Ho Bin; Lee, JeongYong, JOURNAL OF MATERIALS SCIENCE, v.26, no.10, pp.2603 - 2607, 1991-05

4
FORMATION AND EPITAXIAL-GROWTH OF TITANIUM-DISILICIDE ON SI (111)

CHOI, CK; PARK, HH; Lee, JeongYong; CHO, KI; PAEK, MC; KWON, OJ; KIM, KH; et al, JOURNAL OF CRYSTAL GROWTH, v.115, no.1-4, pp.579 - 588, 1991-12

5
INFLUENCE OF TIAS PRECIPITATE FORMATION ON MORPHOLOGY DEGRADATION OF THE TISI2/AS-DOPED POLYSILICON SYSTEM

PARK, HH; Lee, JeongYong; CHO, KI; PAEK, MC; KWON, OJ; CHOI, CK; NAM, KS, THIN SOLID FILMS, v.208, no.2, pp.168 - 171, 1992-02

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