Showing results 1 to 1 of 1
The effect of nitrogen incorporation on surface properties of silicon oxynitride films Hong, Jongin; Kim, Yunseok; Paik, Hanjong; No, Kwangsoo; Lukes, Jennifer R, PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, v.3, pp.25 - 27, 2009-01 |
Discover