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Studies on Microvoids at the Interface of Direct Bonded Silicon Wafers Yun, Sun-Jin; Ahn, Kun-Young; Yi, Kyoung-Soo; Kang, Sang-Won, Journal of The Electrochemical Society, 139(8), 2326-2330, 1992-08 |
STUDIES ON MICROVOIDS AT THE INTERFACE OF DIRECT BONDED SILICON-WAFERS Yun, Sun-Jin; Ahn, Kun-Young; Yi, Kyoung-Soo; Kang, Sang-Won, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.139, no.8, pp.2326 - 2330, 1992-08 |
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