Showing results 1 to 2 of 2
Sub-50 nm Template Fabrications for Nanoimprint Lithography Using Hydrogen Silsesquioxane and Silicon Nitride Shim, Jae-Yeob; Baek, Kyu-Ha; Park, Kun-Sik; Shin, Hong-Sik; No, Kwang-Soo; Lee, Ki-Jun; Do, Lee-Mi, JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.10, pp.3628 - 3630, 2010-05 |
Three-dimensional nanofabrication using hydrogen silsesquioxane/poly(methylmethacrylate) bilayer resists Do, Hyung Wan; Chang, Jae-Byum; Berggren, Karl K., JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.32, no.6, 2014-11 |
Discover