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Thermochemical stability of IrO2 bottom electrodes in direct-liquid-injection metalorganic chemical vapor deposition of Pb(Zr,Ti)O-3 films Byun, KM; Lee, Won-Jong, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, v.43, no.5A, pp.2655 - 2660, 2004-05 |
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