Browse "Dept. of Materials Science and Engineering(신소재공학과)" by Subject Ru
Showing results 4 to 6 of 6
| Composition and electrical properties of metallic Ru thin films deposited using Ru(C6H6)(C6H8) precursor Choi, J; Choi, Y; Hong, J; Tian, H; Roh, JS; Kim, Y; Chung, TM; et al, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, v.41, pp.6852 - 6856, 2002-11 |
| Oxygen diffusion through RuO2 bottom electrode of integrated ferroelectric capacitors Ahn, JH; Lee, WJ; Kim, Ho Gi, MATERIALS LETTERS, v.38, no.4, pp.250 - 253, 1999-02 |
| Surface and interface microstructural properties of Ru thin films grown on InSb (111) substrates at room temperature Kim, TW; Lee, DU; Lee, JH; Yoon, YS; Lee, JeongYong; Park, HL, APPLIED SURFACE SCIENCE, v.161, no.3-4, pp.452 - 458, 2000-07 |
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