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High-Performance Poly-Si TFT Using a Poly-Si Film Prepared by a Silicide-Enhanced Rapid Thermal Annealing (SERTA) Process Ahn, Byung Tae; Moon, Seonhong; Yang, Yongho; Kang, Seungmo; Kim, Jonsu, IMID 2013, The Korean Information Display Society, The Society for Information Display, 2013-08-29 |
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