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College of Engineering(공과대학)Dept. of Chemical and Biomolecular Engineering(생명화학공학과)CBE-Conference Papers(학술회의논문)

Nanoporous SiCoH/CxHy Dual Films with Ultralow Dielectric Constant and High Young's Modulus

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dc.contributor.authorPark, Jong-Min-
dc.contributor.authorKong, Byung-Seon-
dc.contributor.authorJung HeeTae-
dc.date.accessioned2013-03-29T15:11:35Z-
dc.date.available2013-03-29T15:11:35Z-
dc.date.created2012-07-06-
dc.date.issued2012-04-10-
dc.identifier.citation2012 MRS Spring Meeting, v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/171639-
dc.languageENG-
dc.publisherMRS-
dc.titleNanoporous SiCoH/CxHy Dual Films with Ultralow Dielectric Constant and High Young's Modulus-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationname2012 MRS Spring Meeting-
dc.identifier.conferencecountryUnited States-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorJung HeeTae-
dc.contributor.nonIdAuthorPark, Jong-Min-
dc.contributor.nonIdAuthorKong, Byung-Seon-
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CBE-Conference Papers(학술회의논문)
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