NOVEL 3D FORCE SENSOR USING ULTRA-THIN SILICON STRAIN GAUGE BONDED ON METAL MEMBRANE

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Publisher
IEEE
Issue Date
2009-06-21
Language
ENG
Citation

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, pp.1920 - 1923

URI
http://hdl.handle.net/10203/17120
Appears in Collection
AE-Conference Papers(학술회의논문)
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