Performance evaluation of deterministic flow lines: Redundant modules and application to semiconductor manufacturing equipment
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Park, Kyungsu | - |
| dc.contributor.author | Morrison, James R | - |
| dc.date.accessioned | 2013-03-29T07:41:35Z | - |
| dc.date.available | 2013-03-29T07:41:35Z | - |
| dc.date.created | 2012-06-20 | - |
| dc.date.issued | 2010-08 | - |
| dc.identifier.citation | 6th Annual IEEE Conference on Automation Science and Engineering , v., no., pp.45 - 50 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/169113 | - |
| dc.language | ENG | - |
| dc.publisher | IEEE CASE | - |
| dc.title | Performance evaluation of deterministic flow lines: Redundant modules and application to semiconductor manufacturing equipment | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 45 | - |
| dc.citation.endingpage | 50 | - |
| dc.citation.publicationname | 6th Annual IEEE Conference on Automation Science and Engineering | - |
| dc.identifier.conferencecountry | Canada | - |
| dc.identifier.conferencecountry | Canada | - |
| dc.contributor.localauthor | Morrison, James R | - |
| dc.contributor.nonIdAuthor | Park, Kyungsu | - |
- Appears in Collection
- IE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.