Development of compact high precision linear piezoelectric stepping positioner with nanometer accuracy and large travel range

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Many application areas such as semiconductor manufacture, precision optics alignment, and microbiological cell manipulation require ultraprecision positioning systems with a high positioning resolution and large motion range. This article describes the development of a compact high precision linear piezoelectric stepping positioner for precision alignment of optical elements. The positioner is designed to have a compact and symmetric structure, high positioning resolution, large motion range, high force density, adequate dynamic range, and power-off hold. The positioner is fabricated according to these specifications and performance evaluation tests are carried out. A resolution of 10 nm, speed of 1 mm/s, push force of 25 N, and stiffness of 10.4 N/mu m are attained while maintaining a compact size of 32x42x60 mm(3). The required power consumption is 52.33 W. The test results confirm that the developed positioner could be successfully applied to the precision alignment of optical elements. (C) 2007 American Institute of Physics.
Publisher
AMER INST PHYSICS
Issue Date
2007-07
Language
English
Article Type
Article
Keywords

DESIGN; STAGE; MOTOR; MECHANISM; TRANSDUCER; RESOLUTION; ACTUATORS

Citation

REVIEW OF SCIENTIFIC INSTRUMENTS, v.78, no.7, pp.561 - 569

ISSN
0034-6748
DOI
10.1037/1.2756627
URI
http://hdl.handle.net/10203/16591
Appears in Collection
ME-Journal Papers(저널논문)
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