DC Field | Value | Language |
---|---|---|
dc.contributor.author | Song, Cheol | ko |
dc.contributor.author | Kim, Tae Joong | ko |
dc.contributor.author | Gweon, Dae-Gab | ko |
dc.date.accessioned | 2010-02-10T05:58:45Z | - |
dc.date.available | 2010-02-10T05:58:45Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2007 | - |
dc.identifier.citation | INTERNATIONAL JOURNAL OF OPTOMECHATRONICS, v.1, no.1, pp.27 - 45 | - |
dc.identifier.issn | 1559-9612 | - |
dc.identifier.uri | http://hdl.handle.net/10203/16588 | - |
dc.description.abstract | This article presents a new approach to the design of confocal differential heterodyne interferometer (CDHI), which is a combination of differential heterodyne interferometer (DHI) with confocal laser scanning microscopy (CLSM). The CDHI can measure a step height over a quarter of wavelength of the light source, which can not be accurately measured by DHI and CLSM, respectively. The approach is that it utilizes a beam-scanning method instead of transporting a sample to be measured. The measurement results carried out for samples having step height are found to be comparable in precision with those measured by commercial scanning electron microscopes. | - |
dc.language | English | - |
dc.language.iso | en_US | en |
dc.publisher | TAYLOR FRANCIS INC | - |
dc.title | BEAM SCANNING CONFOCAL DIFFERENTIAL HETERODYNE INTERFEROMETRY | - |
dc.type | Article | - |
dc.identifier.wosid | 000207178400003 | - |
dc.type.rims | ART | - |
dc.citation.volume | 1 | - |
dc.citation.issue | 1 | - |
dc.citation.beginningpage | 27 | - |
dc.citation.endingpage | 45 | - |
dc.citation.publicationname | INTERNATIONAL JOURNAL OF OPTOMECHATRONICS | - |
dc.identifier.doi | 10.1080/15599610701261076 | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.contributor.localauthor | Gweon, Dae-Gab | - |
dc.contributor.nonIdAuthor | Song, Cheol | - |
dc.contributor.nonIdAuthor | Kim, Tae Joong | - |
dc.type.journalArticle | Article | - |
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