Determination of two-dimensional planar displacement by moire fringes of concentric-circle gratings
We investigate the moire fringe pattern of two concentric-circle gratings with the aim of measuring the relative two-dimensional planar displacement induced between the gratings. In the first stage we give a comprehensive mathematical approach for the analysis of fringe patterns. Then we suggest a fast computational measurement algorithm that uses a Fourier transformation technique. Finally, our experimental results prove that a measuring accuracy of 0.01 mum can be achieved with this method.
- Publisher
- OPTICAL SOC AMER
- Issue Date
- 1994-08
- Language
- English
- Article Type
- Article
- Description
This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://www.opticsinfobase.org/abstract.cfm?URI=ao-33-22-5171 . Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
- Keywords
X-RAY-LITHOGRAPHY; PATTERNS
- Citation
APPLIED OPTICS, v.33, no.22, pp.5171 - 5176
- ISSN
- 1559-128X
- Appears in Collection
- ME-Journal Papers(저널논문)
- Files in This Item
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