DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, D. | ko |
dc.contributor.author | Lee, W.S. | ko |
dc.contributor.author | Provin, e J. | ko |
dc.contributor.author | Lee, J.-O. | ko |
dc.contributor.author | Yoon, Jun-Bo | ko |
dc.contributor.author | Howe, R.T. | ko |
dc.contributor.author | Mitra, S. | ko |
dc.contributor.author | Wong, H.-S.P. | ko |
dc.date.accessioned | 2013-03-28T10:26:29Z | - |
dc.date.available | 2013-03-28T10:26:29Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2010-01-24 | - |
dc.identifier.citation | 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, pp.456 - 459 | - |
dc.identifier.issn | 1084-6999 | - |
dc.identifier.uri | http://hdl.handle.net/10203/164878 | - |
dc.language | English | - |
dc.publisher | IEEE | - |
dc.title | Titanium nitride sidewall stringer process for lateral nanoelectromechanical relays | - |
dc.type | Conference | - |
dc.identifier.wosid | 000278416400112 | - |
dc.identifier.scopusid | 2-s2.0-77952748531 | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 456 | - |
dc.citation.endingpage | 459 | - |
dc.citation.publicationname | 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 | - |
dc.identifier.conferencecountry | CC | - |
dc.identifier.conferencelocation | Hong Kong | - |
dc.contributor.localauthor | Yoon, Jun-Bo | - |
dc.contributor.nonIdAuthor | Lee, D. | - |
dc.contributor.nonIdAuthor | Lee, W.S. | - |
dc.contributor.nonIdAuthor | Provin, e J. | - |
dc.contributor.nonIdAuthor | Lee, J.-O. | - |
dc.contributor.nonIdAuthor | Howe, R.T. | - |
dc.contributor.nonIdAuthor | Mitra, S. | - |
dc.contributor.nonIdAuthor | Wong, H.-S.P. | - |
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