Electrothermally actuated free space board-to-board optical interconnect with zero power hold

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dc.contributor.authorChou, J.B.-
dc.contributor.authorYu, Kyoungsik-
dc.contributor.authorHorsley, D.A.-
dc.contributor.authorMathai, S.-
dc.contributor.authorYoxall, B.-
dc.contributor.authorTan, M.-
dc.contributor.authorWang, S.Y.-
dc.contributor.authorWu, M.C.-
dc.date.accessioned2013-03-28T02:57:03Z-
dc.date.available2013-03-28T02:57:03Z-
dc.date.created2012-06-28-
dc.date.issued2009-06-21-
dc.identifier.citationSolid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International, pp.2202 - 2205-
dc.identifier.urihttp://hdl.handle.net/10203/162420-
dc.description.abstractWe present an electrothermally actuated MEMS lens scanner for board-to-board free-space optical interconnect systems capable of zero standby power. U-shaped thermal brakes, and lens frames are designed, fabricated, and characterized with a vertical cavity surface emitting laser (VCSELs) for dynamic beam steering. We demonstrate up to 170 mum displacement, at a maximum speed of 350 mum/s. The mechanical brakes have a holding force of 1.6 mN with switching speeds of up to 100 Hz. A telecentric (4-f) optical interconnect operating at 1.25 Gb/s is demonstrated. The microlens scanner increases the tilt tolerance of the board by 2.5deg.-
dc.languageEnglish-
dc.publisherTRANSDUCERS-
dc.titleElectrothermally actuated free space board-to-board optical interconnect with zero power hold-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage2202-
dc.citation.endingpage2205-
dc.citation.publicationnameSolid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International-
dc.identifier.conferencecountryUS-
dc.identifier.conferencelocationDenver-
dc.contributor.localauthorYu, Kyoungsik-
dc.contributor.nonIdAuthorChou, J.B.-
dc.contributor.nonIdAuthorHorsley, D.A.-
dc.contributor.nonIdAuthorMathai, S.-
dc.contributor.nonIdAuthorYoxall, B.-
dc.contributor.nonIdAuthorTan, M.-
dc.contributor.nonIdAuthorWang, S.Y.-
dc.contributor.nonIdAuthorWu, M.C.-

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