가간섭 EUV 생성을 위한 미세 패턴의 설계 및 제작Design and Fabrication of Nano-devices for coherent EUV generation

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Publisher
한국정밀공학회
Issue Date
2008-06-11
Language
KOR
Citation

한국정밀공학회 2008년도 춘계학술대회 , pp.127 - 128

URI
http://hdl.handle.net/10203/161303
Appears in Collection
ME-Conference Papers(학술회의논문)
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