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College of Engineering(공과대학)Dept. of Nuclear and Quantum Engineering(원자력및양자공학과)NE-Conference Papers(학술회의논문)

Measurement of density and size of dust particles in capacitive-coupled plasmas

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dc.contributor.authorSeon, CR-
dc.contributor.authorChai, KB-
dc.contributor.authorPark, HY-
dc.contributor.authorChoe, Wonho-
dc.contributor.authorPark, S-
dc.contributor.authorShin, YH-
dc.contributor.authorChung, KH-
dc.date.accessioned2013-03-18T21:29:46Z-
dc.date.available2013-03-18T21:29:46Z-
dc.date.created2012-02-06-
dc.date.issued2006-07-
dc.identifier.citation, v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/152622-
dc.languageENG-
dc.titleMeasurement of density and size of dust particles in capacitive-coupled plasmas-
dc.typeConference-
dc.type.rimsCONF-
dc.identifier.conferencecountryAustralia-
dc.identifier.conferencecountryAustralia-
dc.contributor.localauthorChoe, Wonho-
dc.contributor.nonIdAuthorSeon, CR-
dc.contributor.nonIdAuthorChai, KB-
dc.contributor.nonIdAuthorPark, HY-
dc.contributor.nonIdAuthorPark, S-
dc.contributor.nonIdAuthorShin, YH-
dc.contributor.nonIdAuthorChung, KH-
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NE-Conference Papers(학술회의논문)
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