DC Field | Value | Language |
---|---|---|
dc.contributor.author | 황주호 | - |
dc.contributor.author | 박천홍 | - |
dc.contributor.author | 이찬홍 | - |
dc.contributor.author | 김승우 | - |
dc.date.accessioned | 2013-03-18T21:12:37Z | - |
dc.date.available | 2013-03-18T21:12:37Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2003 | - |
dc.identifier.citation | 한국정밀공학회 2003년 춘계학술대회 , v., no., pp.359 - 362 | - |
dc.identifier.uri | http://hdl.handle.net/10203/152477 | - |
dc.description.abstract | The aerostatic stage. which is used in semiconductor process, is demanded higher velocity and more precise accuracy for higher productivity and integrated performance. So, in the case of XY stage, H type structure, which is designed two co-linear axis of guide-way, driving force in one surface, has advantage of velocity and accuracy compared to conventional tacked type XY stage. To analyze characteristics of H type aerostatic stage, H type aerostatic surface XY stage is made, which is driven by linear motor and detected position with precise optical linear scale. And, analyze characteristics of motion error, effect of angular motion on positioning accuracy error and effect of simultaneous control on variation of velocity. | - |
dc.language | KOR | - |
dc.publisher | 한국정밀공학회 | - |
dc.title | 평면 XY 공기정압 스테이지의 운동특성 분석 | - |
dc.title.alternative | Analysis on the motion characteristics of surface XY aerostatic stage | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 359 | - |
dc.citation.endingpage | 362 | - |
dc.citation.publicationname | 한국정밀공학회 2003년 춘계학술대회 | - |
dc.identifier.conferencecountry | South Korea | - |
dc.identifier.conferencecountry | South Korea | - |
dc.contributor.localauthor | 김승우 | - |
dc.contributor.nonIdAuthor | 황주호 | - |
dc.contributor.nonIdAuthor | 박천홍 | - |
dc.contributor.nonIdAuthor | 이찬홍 | - |
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